autores Durães, Dalila Alves Trabulo, P.M. Durães, D.A. Mendes, P.M. Garrido, P.J. Correia, J.H. Trabulo, Pedro Aksoy-Aksel, A.
palavras-chave Bulk-micromachining Bulk-micromachining technology RFIC devices Science & Technology Silicon spiral inductors