autores Cabral, Jorge Esteves Moreira, E. Gaspar, J. Luis Alexandre Rocha Alves, Filipe Serra Esteves Moreira, Eurico Gaspar, J. Moreira, Eurico Esteves
palavras-chave Control system Electrostatic micro-actuators FPGA Feedback linearization MEMS PID control Tracking
Digital Object Identifier (DOI) https://doi.org/10.1016/j.sna.2016.04.002 https://doi.org/10.1016/j.sna.2016.04.002