Ion-beam sputtered ferroelectric ZrO2 thin films, J. P. B. Silva, F.G. Figueiras, R.F. Negrea, M.C. Istrate, S. Dutta, H. Aramberri, J. Íñiguez, C. Ghica, K.C. Sekhar, A.L. Kholkin, 4th workshop of the European Focused Ion Beam Network and the joint Fit4Nano meeting. Technical University of Vienna, Austria, 27-29 September 2021.