Structural characterization of crystalline SiGe layers grown by RF-Sputtering”, E. M. F. Vieira, J. Martín-Sánchez, A. G. Rolo, S. Levichev, A. Chahboun, M. Buljan, E. Alves, N.P. Barradas4, S. Bernstorff, O. Conde, and M. J. M. Gomes Symposium G, symposium G : Semiconductor nanostructures towards electronic and optoelectronic device applications, Abstract ID XZC1X