The influence of oxygen flow during deposition on the structural, mechanical and tribological properties of titanium oxide magnetron sputtered thin films Artigo Académico uri icon

autores

  • Luís António Carvalho Gachineiro da Cunha
  • Constantin, D.G.
  • Moura, C.
  • Munteanu, D.
  • Cunha, L.

data de publicação

  • janeiro 1, 2012