Effect of argon ion energy on the performance of silicon nitride multilayer permeation barriers grown by hot-wire CVD on polymers uri icon

resumo

  • One of the authors (S.M.) acknowledges Direction des Relations Extérieures of Ecole Polytechnique for financial support.

autores

  • Alpuim, P.
  • Cerqueira, María de Fátima
  • Alpuim, P.
  • Geffroy, B.
  • Bonnassieux, Y.
  • Majee, S.
  • Bourée, J. E.
  • Cerqueira, M.F.
  • Alpuim, P.
  • Tondelier, D.
  • Geffroy, B.
  • Majee, S.
  • Bonnassieux, Y.
  • Cerqueira, M. F.
  • Bourée, J.E.
  • Tondelier, D.

data de publicação

  • janeiro 1, 2015