autores Correia, J. H. Pimenta, Sara Filomena Ribeiro Goncalves, S. B. Ribeiro, J. F. A. M. Loureiro Correia, J. H. Fernandes, H. C. Goncalves, SB Loureiro, A. M. Pimenta, S Fernandes, H. C. J. F. Ribeiro Correia, J. H.
palavras-chave 2D neural silicon shafts Biosensors Blade cutting High-aspect ratio devices IC-compatible manufacturing Mechanical implantation
Digital Object Identifier (DOI) https://doi.org/10.1109/jmems.2018.2868229 https://doi.org/10.1109/jmems.2018.2868229