Residual stress states in sputtered Ti1-xSixNy films Artigo Académico uri icon

autores

  • Filipe Vaz
  • Luis Manuel Fernandes Rebouta
  • Vaz, F
  • Rebouta, L
  • Goudeau, P
  • Riviere, JP
  • Rivière, J.P.
  • Schaffer, E
  • Schäffer, E.
  • Kleer, G
  • Bodmann, M

data de publicação

  • janeiro 1, 2002