autores Alpuim, P. Vasilevskiy, Mikhail Alpuim, P. Paul, O. Alpuim, P. Gaspar, J. Gaspar, J. Gieschke, P. Ehling, C. Gieschke, P. Ehling, C. Kistner, J. Gonalves, N.J. Kistner, J. Gonçalves, N. J. Vasilevskiy, M.I. Paul, O.
palavras-chave Bending Dark conductivity Nanofabrication Nanostructured materials Piezoresistance Plasma CVD Semiconductor thin films Silicon