Structural transitions in hard Si-based TiN coatings: The effect of bias voltage and temperature Artigo Académico uri icon

autores

  • Filipe Vaz
  • L Rebouta
  • Vaz, F
  • Rebouta, L
  • Goudeau, P
  • Girardeau, T
  • Pacaud, J
  • Riviere, JP
  • Traverse, A

data de publicação

  • janeiro 1, 2001