Permeation barrier performance of Hot Wire-CVD grown silicon-nitride films treated by argon plasma uri icon

resumo

  • "Available online 12 October 2014"

autores

  • Alpuim, P.
  • Cerqueira, María de Fátima
  • Alpuim, P.
  • Majee, S.
  • Bourée, J. E.
  • Cerqueira, M.F.
  • Majee, S.
  • Tondelier, D.
  • Cerqueira, M. F.
  • Vanel, J.C.
  • Geffroy, B.
  • Tondelier, D.
  • Bonnassieux, Y.
  • Vanel, J. C.
  • Alpuim, P.
  • Geffroy, B.
  • Bonnassieux, Y.
  • Bourée, J.E.

data de publicação

  • janeiro 1, 2015