Responsible for users training for thin-film deposition in physical vapor deposition (PVD) systems and atomic-layer-deposition (ALD) system. - MicroNanoFabs lab (CMEMS-UM) uri icon

autores

  • E M F Vieira
  • E.M.F. Vieira
  • M. F. Silva
  • Correia, J.H.

data de publicação

  • setembro 2021