autores Maria de Jesus de Matos Gomes Silva, José Pedro Basto Sekhar, K. C. Negrea, R. F. Ghica, C. Dastan, D. Gomes, M. J. M.
palavras-chave Ferroelectric Glass substrate Ion-beam sputtering deposition technique Orthorhombic ZrO films 2 Orthorhombic ZrO2 films