publicações selecionadas
-
artigo académico
- High-rate deposition of nano-crystalline silicon thin films on plastics. physica status solidi (RRL) - Rapid Research Letters. 2011
-
artigo de revista
-
Effect of hot-filament annealing in a hydrogen atmosphere on the electrical and structural properties of Nb-doped TiO
2 sputtered thin films. Thin Solid Films. 2012 - Piezoresistive silicon thin film sensor array for biomedical applications. Thin Solid Films. 2011
- Deposition of silicon nitride thin films by hot-wire CVD at 100 °C and 250 °C. Thin Solid Films. 2009
-
Effect of hot-filament annealing in a hydrogen atmosphere on the electrical and structural properties of Nb-doped TiO