publicações selecionadas
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artigo académico
- Influence of low energy argon plasma treatment on the moisture barrier performance of hot wire-CVD grown SiNxmultilayers. Japanese Journal of Applied Physics. 2014
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artigo de revista
- Flexible organic-inorganic hybrid layer encapsulation for organic opto-electronic devices. Progress in Organic Coatings. 2015
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Influence of low energy argon plasma treatment on the moisture barrier performance of hot wire-CVD grown SiN
x multilayers. Japanese Journal of Applied Physics. 2014 - The effect of argon plasma treatment on the permeation barrier properties of silicon nitride layers. Revista Portuguesa de Estudos Regionais. 2013