Structural development in hard Si-based TiN coatings as a function of temperature: A comprehensive study in vacuum and in air Artigo Académico uri icon

autores

  • Soares, Delfim
  • Vaz, F.
  • Rebouta, L.
  • Carvalho, S.
  • Rocha, L.A.
  • Soares, D.
  • Alves, E.

data de publicação

  • janeiro 1, 2002