Development of tantalum oxynitride thin films produced by PVD: Study of structural stability uri icon

resumo

  • Sectoral Operation Programme Human Resources Development (SOP HRD), ID76945 financed from the European Social Fund and by the Romanian Government.

autores

  • Cacilda Maria Lima de Moura
  • Filipe Vaz
  • Luís António Carvalho Gachineiro da Cunha
  • Cristea, D.
  • Cunha, L.
  • Crisan, A.
  • Cristea, D.
  • Barradas, N.P.
  • Crisan, A.
  • Alves, E.
  • Barradas, N. P.
  • Alves, E.
  • Moura, C.
  • Moura, C.
  • Vaz, F.
  • Cunha, L.
  • Vaz, F.

data de publicação

  • janeiro 1, 2013